Abstract
Using the recently developed SIMS–SPM prototype, secondary ion mass spectrometry (SIMS) data was combined with topographical data from the scanning probe microscopy (SPM) module for five test structures in order to obtain accurate chemical 3D maps: a polystyrene/polyvinylpyrrolidone (PS/PVP) polymer blend, a nickel-based super-alloy, a titanium carbonitride-based cermet, a reticle test structure and Mg(OH)2 nanoclusters incorporated inside a polymer matrix. The examples illustrate the potential of this combined approach to track and eliminate artefacts related to inhomogeneities of the sputter rates (caused by samples containing various materials, different phases or having a non-flat surface) and inhomogeneities of the secondary ion extraction efficiencies due to local field distortions (caused by topography with high aspect ratios). In this respect, this paper presents the measured relative sputter rates between PVP and PS as well as in between the different phases of the TiCN cermet.
Highlights
With the progress of miniaturisation, driven by future needs in various fields in materials and life sciences, the 3D analysis of devices and material structures becomes increasingly challenging
To achieve actual high-resolution Secondary ion mass spectrometry (SIMS) 3D analyses without risking the artefacts mentioned above, we developed a scanning probe microscopy (SPM) module that we integrated into the Cameca NanoSIMS50 [6,7]
A correlative approach between secondary ion mass spectrometry and atomic force microscopy in a single instrument leads to 3D chemical maps with highest sensitivity and enhanced spatial accuracy
Summary
With the progress of miniaturisation, driven by future needs in various fields in materials and life sciences, the 3D analysis of devices and material structures becomes increasingly challenging. The interest for performing bimodal or even multimodal nano-analysis has increased during the last decade [1]. Nano-analytical techniques and instruments providing both excellent spatial resolution and high-sensitivity chemical information are of utmost importance for investigations at the nanoscale. Secondary ion mass spectrometry (SIMS) is a method of choice for high sensitivity analysis, including isotopic ratio measurements [2,3]. State-ofthe-art SIMS imaging instruments can provide chemical 2D and Beilstein J.
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