Abstract
Detection of ultralow magnetic field requires a magnetic sensor with high sensitivity and a low noise level. In this work, we used the Co20Fe60B20/Ti/Co20Fe60B20 magnetically coupled multilayer as the core structure of an anomalous Hall sensor. We adjusted the thickness of the Ti interlayer to modify its perpendicular magnetic anisotropy and interlayer magnetic coupling, thereby improving the sensitivity of the anomalous Hall sensor. Through the investigation of magnetic field response and noise properties of devices with different Ti thicknesses, the highest sensitivity of 34 803 Ω/T and the best magnetic field detectivity of 4.6 nT/Hz at 1 Hz were achieved with a Ti thickness of 2.0 nm at room temperature. This anomalous Hall sensor has both ultrahigh sensitivity and magnetic field detectivity, making it a good candidate for applications in detecting weak magnetic fields.
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