High sensitivity and broad linearity range pressure sensor based on hierarchical in-situ filling porous structure

Abstract

Flexible piezoresistive pressure sensor with high sensitivity over a broad linearity range have been attracting tremendous attention for its applications in health monitoring, artificial intelligence, and human-machine interfaces. Herein, we report a hierarchical in-situ filling porous piezoresistive sensor (HPPS) by direct ink writing (DIW) printing and curing of carbon nanofibers (CNFs)/polydimethylsiloxane (PDMS) emulsion. Hierarchical geometry significantly increases the contact area, distributes stress to multilayered lattice and internal porous structure, resulting in a broad sensing range. Moreover, unlike conventional hollow porous structure, the CNFs networks in-situ filling porous structure generates more contact sites and conductive pathways during compression, thereby achieving high sensitivity and linearity over entire sensing range. Therefore, the optimized HPPS achieves high sensitivity (4.7 kPa−1) and linearity (coefficient of determination, R2 = 0.998) over a broad range (0.03–1000 kPa), together with remarkable response time and repeatability. Furthermore, the applications in diverse pressure scenarios and healthcare monitoring are demonstrated.