Abstract
A possibility for fabrication of a high-sensitivity accelerometer is considered. The linear acceleration of a sensor causes displacement of the proof mass electrode. The displacement detector is based on a strong dependence of the tunneling or cold emission current on the gap between the electrodes. The geometry of the electrodes that provides the best sensitivity is determined. The accelerometer with tunneling-emission electrodes is fabricated. At frequencies up to 5 kHz the resolution reaches 10/sup -4/ g/Hz/sup 1/2/ in the tunneling mode and 10/sup -3/ g/Hz/sup 1/2/ in the emission mode.
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