Abstract

In this work, a high sensitivity humidity sensor based on Molybdenum disulfide/graphene oxide quantum dot (MoS2/GOQD) composite film was proposed. The humidity sensitive thin film of MoS2/GOQD was deposited on Au interdigitated microelectrodes via a facile drop-coating technique. The sensing characteristics of the MoS2/GOQD composite film sensor were investigated against various relative humidity (RH) at room temperature. The experimental results indicated that MoS2/GOQD composite film sensor possessed a high sensitivity of 369 pF/%RH, which is about twenty times larger than that of pure MoS2 based humidity sensor. Moreover, the sensor exhibited a good repeatability, rapid response/recovery speed, low hysteresis, and good long-term stability. Furthermore, the underlying humidity sensitivity enhancement mechanism of the fabricated sensor was analyzed and discussed in detail. This research demonstrates that the MoS2/GOQD composite film is a promising sensitive material for fabricating a high sensitivity humidity sensor.

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