Abstract
Ultra-thin (10 μm) lithium tantalate crystal (LiTaO3) was used as sensitive layer in high responsivity room temperature pyroelectric infrared detector. The responsivity reaches 1.22 × 105 V/W and the noise equivalent power value reaches as low as 7.52 × 10−11 W at 20 Hz operating frequency by using blackbody radiation. The responsivity rate of the pyroelectric infrared detector can be enhanced. It provides a feasible approach for fabricating high response rate pyroelectric infrared sensor and infrared imaging application.
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