High Responsivity and Wavelength Selectivity of GaN‐Based Resonant Cavity Photodiodes

Abstract

AbstractThe implementation of blue‐light photodiodes based on InGaN in emerging technologies, such as free‐space visible light communication (VLC), requires transformative approaches toward enhanced performance, miniaturization, and integration beyond current Si‐based technologies. This work reports on the design and realization of high‐performance InGaN‐based resonant cavity photodiodes with high‐reflectivity lateral porous GaN distributed Bragg reflectors. The well‐controlled porosification of GaN on the 2‐inch wafers enables design and fabrication of optical components, unlocking the potential of nitride semiconductors for several applications. These resonant‐cavity‐enhanced photodiodes, which have a 12 nm‐thick optically active region, exhibit a high responsivity (≈0.1 A W−1) to blue‐light even without any externally applied voltage. Furthermore, the device can operate as both an emitter and a detector of visible light at well‐defined wavelengths with spectral overlap between the electroluminescence emission and photocurrent responsivity, meeting the requirement of wavelength selectivity, thermal stability, and low‐power consumption for VLC, with potential for integration of different functionalities, that is, light emission and detection, on a single chip without additional light filters.