Abstract
X-ray microbeam generated by a Kirkpatrik-Baez (KB) mirror optics with a set of two parabolic-shaped reflective surfaces was tested at an undulator beamline BL47XU of SPring-8. The KB mirror used in the experiment was fabricated by numerically-controlled polishing technique at Cannon Co. Ltd. Measured focal spot size at the x-ray energy of 8 keV in the vertical and the horizontal were 0.75 μm and 0.32 μm, respectively. The photon flux of the focal spot was 2 x 10'° [photons / s / 100 mA ring current]. Tantalum test pattern of the 0.2 μm line width was clearly observed with raster scan.
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