Abstract
Spectroscopic X-ray imaging with semiconductor detectors allows to reconstruct photon events much finer than the pixelsize, if the charge cloud extends over several pixels. To face the challenge of high sensitivity low energy X-ray sensors with (sub)micron resolution and 100% fill factor, MPG HLL developed improved PnCCDs with 36μm pixelsize, very fast frame transfer and column parallel readout. A simple and fast data analysis method to calculate the hit position from event cluster shapes is presented together with measurement results for image and spectral resolution.
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