Abstract
High resolution X-ray fluorescence measurements were carried out using a flat analyzer crystal and an X-ray CCD (charge-coupled device). A comparison of the detector was made between the CCD and the position sensitive proportional counter (PSPC), and the advantage of the CCD in better spatial resolution and two-dimensional spatial resolution was demonstrated. Full width at half maximum (FWHM) of measured Cu Kα1,2 X-ray fluorescence spectra shows clear dependence of beam size on the sample, and the FWHM of 2.4eV can be expected with the use of an X-ray microbeam.
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