High-resolution triple-crystal X-ray diffraction experiments performed at the Australian National Beamline Facility on a silicon sample with lateral periodic superstructure

Abstract

The synchrotron X-ray results reported here are from the first high-resolution triple-crystal diffraction experiments performed at the Australian National Beamline Facility (ANBF). At the centre of the ANBF is a multipurpose high-resolution two-axis vacuum X-ray diffractometer. The Si(111) sample studied has been implanted with B+ ions through a one-dimensional SiO2 strip pattern with a 5.83 μm period and 4 μm open region, to produce a sample with a periodic superstructure in the lateral direction. The triple-crystal data were collected in the form of two-dimensional intensity maps in the vicinity of the 111 Bragg peak. Results collected in both air and vacuum are compared, as are results with and without the oxide layer. The data collected in vacuum indicate that it is possible at the ANBF to measure lattice distortions perpendicular to the sample surface with a 50 A depth resolution.