Abstract
High-spatial-resolution soft X-ray digital in-line holographic microscopy was developed. The scheme uses highly coherent and divergent lights generated by a combination of a Fresnel zone plate (FZP) and a pinhole of 200 nm radius with incidence incoherent lights tightly focused on the pinhole. At a wavelength of 2.38 nm, objects such as a carbon powder particle and a gold pattern were imaged with a spatial resolution of ∼200 nm. It approached the theoretically achievable resolution (i.e., the pinhole's radius) of typical pinhole-based in-line holographic microscopy. It is better than the previously reported best result by a factor of 2.
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