Abstract
Large-angle convergent-beam electron diffraction patterns superimposed on a high-spatial-resolution shadow image of a cross-sectional specimen of the Ge x Si 1− x /Si strained-layer superlattice has been obtained by using an electron beam with a rather small spot size in a Philips EM420 electron microscope working at 100 kV and room temperature. As an example, such a CBED shadow image can provide information about the changes in the lattice parameters, localized variations in strain, and the surface relaxation effect.
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