High Resolution Readout Using a Near-Field Optical Probe Embedded in a Condensed Lens

Abstract

We have developed a novel head structure with an embedded near-field optical probe in a solid immersion lens system. This head structure is suitable for optical probe detection using Scanning Interferometric Apertureless Microscope (SIAM) technology. We fabricated a hemispherical lens with an embedded near-field optical probe. The dielectric coupling between probe and medium generates a signal beam with a scattered field which results in a small phase shift. We can observe the surface features of the medium by detecting the degree of phase. In this way, periodic signals from lands shorter than the optical cutoff can be detected. The signal intensity decreases to 1/e2 with a spacing of 60 nm. The detected signals are generated by the near-field optical probe.