Abstract
The proposed profilometer is based on an optical spectral analysis of white-light interferograms. Phase calculation algorithms are applied within the spectral domain for high-resolution profilometry. Absolute one-way optical path differences are measured without any axial scanning of the interferometer. This method is well adapted for the analysis of rough or binary surfaces with a 1 nm resolution.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
