Abstract
The pulsed electroacoustic (PEA) method is widely known to be an excellent method for the measurement of the space charge distribution which accumulates in thick dielectric materials (1-5 mm). However, because of its lower resolution in the depth direction, conventional application of this method is less suitable for thin specimens than the laser-induced pressure wave method. A new PEA measurement system which can now be applied to thin dielectric materials (<100 /spl mu/m). The resolution in the depth direction is improved to less than several /spl mu/m by detecting signals in a wide frequency range. In addition, the system employs a deconvolution technique with FFT in order to compensate for the frequency characteristics of the piezoelectric sensor. The new PEA measurement system is expected to be useful for quantitative and non-destructive measurement of the space charge distribution in dielectric films.
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