Abstract
The energy loss distribution of ∼ 100 keV H + and He + transmitted through thin carbon films (6–16 nm) has been measured with an energy resolution of ∼ 30 eV in ∼10 −7 Torr. We find the following: (1) the energy loss distribution is fitted by either a symmetric or an asymmetric Gaussian; (2) the film thickness derived from the most probable energy loss ( ΔE p) with the tabulated stopping powers agrees within 10% for H + and He +; (3) ΔE p increases by approximately 20% per μC/mm 2 of H + and He + bombardment, and this effect appears not to be scaled with the nuclear stopping power.
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Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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