High-resolution measurements of angle-resolved X-ray scattering from optically flat mirrors

Abstract

With a compact arrangement using single-crystal collimator and analyzer (silicon 220 reflection) of channel-cut type, angle-resolved scattering (ARS) curves of X-rays (Cu Kα1) for optically flat mirrors have been measured at various glancing angles, ω, of X-rays to the mirror surface with an angular resolution of 4′′. Weak scattered intensity (10−3–10−5 of the specularly reflected beam) is observed over an angular range of a few hundred arc s below and above the direction of specular reflection. When ω is close to the critical angle for total reflection, the scattered intensity at the low-angle tail of ARS curves is higher than that at the high-angle tail. This asymmetric tail profile of ARS curves is explained by simply superposing intensities of specularly reflected beams from surface elements inclined to each other.