High resolution measurement of FGM thin films using picosecond ultrasonics

Abstract

Functionally Graded Materials (FGMs) are materials with elastic properties λ, μ and density ρ depending on spatial coordinates. When between two homogeneous materials the transition layer thickness is of the same order of magnitude as the mechanical wave length, the wave scattering behavior at the interface becomes frequency dependent. The effect is of growing importance for micro- and nanostructures since the relative size of the interface layers is generally larger than in macroscopic structures. In this work a linear material grading is achieved with physical vapor deposition by magnetron sputtering. The used materials are aluminum (Al) and tantalum (Ta) due to their strong variation in acoustic impedance (bulk force reflection coefficient 0.6) and their good intermixing properties. In the sample investigated here the material transition layer thickness amounts to 60nm. With Rutherford Backscattering Spectroscopy (RBS) measurements and electron microscopy (SEM/TEM) the material properties of the sample are characterized. Mechanical waves in the specimen are excited and detected using a pump probe laser acoustic setup. The frequency dependent wave propagation in FGM is demonstrated by investigating the spectral response in theory and experiments. The entire experimental setup is modeled using a finite difference algorithm for better interpretation of the measurements. The frequency dependent wave propagation in FGM is analyzed to characterize the interface and finds applications in high frequency filters, semiconductor manufacturing or thermal barrier layers.