Abstract
In conventional electron beam systems the minimum value of beam diameter and the maximum value of beam current is set by lens aberrations, beam brightness, and by space charge interaction over many centimeters. The limits are more serious as the beam voltage (V0) is reduced. The scanning tunneling microscope (STM) represents a drastic change in electron beam configuration in that the path length is of the same order as the beam radius. We have modeled a modified STM configuration as a field emitting spherical electrode close to the target plane for values of accelerating potential (V0) in the range 50–1000 V. For a given value of V0 and maximum field E0 there are corresponding optimum values of sphere radius R and sphere-to-plane separation S. It appears that it should be possible to confine a beam of 100 V electrons to a radius of 0.02 μm with a current limited only by practical effects at the target or plane.
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More From: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
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