High-resolution imageable miniaturized spectrometer based on graphene micro-electro-mechanical systems

Abstract

This study investigates the utilization of graphene micro-electromechanical systems (MEMS) and photonic crystal composite structures for spectral analysis. Results show that graphene's extreme thinness leads to significant deformation, with the photonic crystal deforming at the picometer scale. Consequently, the miniaturized spectrometer demonstrates exceptional performance, boasting dimensions on the micrometer scale, a resolution of less than 0.5 nm, and a working bandwidth exceeding 0.5 μm. Additionally, when coupled with a high-speed camera, the spectrometer enables the separation and detection of incident spectra in both the temporal and spatial domains, facilitating time and spatially resolved hyperspectral imaging. This single-detector miniaturized spectrometer is chip-integrable and holds promise for diverse applications in biology, medicine, chemical analysis, and beyond.