Abstract
High-resolution sulfur K α X-ray satellite spectra produced by 30 MeV Cl ion irradiation of quartz glass containing ion-implanted sulfur have been obtained. The normalized emission spectra exhibited variations in the intensity distribution of the satellite structure for different implant doses. Correlation of parameters describing the satellite intensity profile to the dose and the local chemical environment suggest that a method for nondestructively probing implant profiles, free from restrictions on the Z of the implant and matrix, may be possible.
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