Abstract
The fabrication of high aspect ratio metallic nanostructures is crucial for the production of efficient diffractive X-ray optics in the hard X-ray range. We present a novel method to increase their structure height via the double-sided patterning of the support membrane. In transmission, the two Fresnel zone plates on the two sides of the substrate will act as a single zone plate with added structure height. The presented double-sided zone plates with 30 nm smallest zone width offer up to 9.9% focusing efficiency at 9 keV, that results in a factor of two improvement over their previously demonstrated single-sided counterparts. The increase in efficiency paves the way to speed up X-ray microscopy measurements and allows the more efficient utilization of the flux in full-field X-ray microscopy.
Highlights
Hard X-ray microscopy comprises several analytical techniques, providing the possibility of imaging highly heterogeneous, organic or inorganic samples using high energy photons
The performance of the best zone plates was further evaluated in X-ray applications, including scanning transmission X-ray microscopy and ptychographic coherent diffractive imaging [27]
We presented an approach to substantially increase the focusing efficiency of Fresnel zone plates in the hard X-ray range
Summary
Hard X-ray microscopy comprises several analytical techniques, providing the possibility of imaging highly heterogeneous, organic or inorganic samples using high energy photons. “Three-dimensional structured on-chip stacked zone plates for nanoscale X-ray imaging with high efficiency,” Nano Research 7(4), 1–8 (2014). “Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-keV regime,” Opt. Express 19(1) 175–184 (2011).
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