Abstract
A method for the determination of oxygen and carbon concentration profiles in materials using the 16O(d,p)17O and 12C(d,p)13C reactions is reported. The method employs a spectrum deconvolution technique to extract the depth profiles in the near surface region. The probing depths obtainable range from 4 to 7 μm depending on the sample composition with a depth resolution of less than 0.25 μm. The profile measurement is calibrated with reference samples containing known concentrations of oxygen and carbon. The deconvolution and comparison of the proton spectra of the reference sample and the sample under study are carried out by an on-line computer system. Concentration profiles can be extracted for materials having less than a few hundred at.ppm of oxygen or carbon.
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