Abstract
This work demonstrates a MEMS piezoresistive pressure sensor and its interface circuit based on a versatile current conveyor based current signal processing. To exploit the effectiveness of current mode design in VLSI, the proposed interface electronics utilizes a differential current signal and performs trans-impedance conversion through a single-ended grounded gain resistor, thus ensuring high sensitivity and linearity. The current mode approach utilizes minimal active components with just two positive current conveyors (CCII+) in a closed loop architecture, thus eliminating the need for a negative current conveyor (CCII−) or an extra CCII+ to implement the same. This approach delivers linearity and offers ease of offset balancing through external control voltages, one each for incremental and decremental cancellation. The circuit performance is investigated in simulation using AD844, which represents a functional current conveyor. Further, the proposed interface is integrated with the fabricated MEMS piezoresistive pressure sensor to obtain a sensor-electronics module. Experimental evaluation of the module reveals a sensitivity of 13.7 V/Bar for low pressure input (0-100mBar).
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