Abstract
High spatial resolution Auger electron spectra and images of supported metal particles have been obtained in a UHV scanning transmission electron microscope. An edge resolution < 3 nm has been achieved. The number of atoms in a small particle can be estimated from the integrated intensity of the Auger electrons. This method is very useful for detecting and measuring particles with sizes smaller than the incident probe size. Ag clusters containing less than 20 atoms have been detected when supported on a thin carbon film.
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