Abstract
A method is presented for performing attractive-mode force potentiometry with submillivolt accuracy and a typical spatial resolution of order 50 nm. The technique permits measurements to be made in air on specimens which may be passivated or oxidized, conducting or semiconducting, with virtually no sensitivity to oxide thickness or character. An initial demonstration is presented showing voltage measurements on a commercial operational amplifier.
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Schedule a callMore From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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