Abstract
This paper presents the fabrication of high reflective sub-wavelength gratings in GaAs on wet oxidizedAlxOy low index layers. This structure can efficiently replace a top Bragg reflector in GaAs-basedvertical cavity lasers (VCSELs), while keeping all the advantages of a monolithic stack.Low refractive index and low loss can be achieved with the oxide sublayer, thus providing ahigh reflectivity over a large wavelength range. Reflectivities above 90% have beenmeasured with stopbands exceeding 130 nm. Further adjustments of the geometricalparameters will enable the reflectivity requirements to be fulfilled for implementation inmicrocavity devices.
Published Version
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