Abstract

The development of highly reflective multilayer mirrors for use in the wavelength region around 6-nm is desired for X-ray photoemission spectroscopy for inner-shell excitation using a Schwarzschild objective. For this application, reflectivity is the most critical parameter determining the performance of multilayer mirrors, because the reflectivity of multilayers in the 6-nm region is generally very low. We have fabricated the Co/C and Cr/C C multilayer mirrors by magnetron sputtering. The measured peak reflectivity of the Cr/C multilayer is about 18.9% at the wavelength of 6.42 nm and the incident angle of 88° and the reflectivity of the Coif multilayer is 10.1 % at the wavelength of 6.06 nm and the incident angle of 88°. The reflectivities of the Cr/C and Co 0.8 Cr 0.2 /C multilayers are enough high. Therefore, we found that Cr/C or Co x Cr 1-x /C multilayer is sufficiently used for Schwarzschild mirror for X-ray photoemission spectroscopy at 6 nm X-ray.

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