Abstract

Ultra-pure water (UPW) for electronic industry is produced via many unit processes including reverse osmosis (RO), pretreatments, membrane degasifier, and ion exchange processes. Generally, 2-pass RO system is adopted in UPW production process to remove ionic and organic matters to meet water quality requirements of post-treatments. Since RO concentrate occupies most of wastewater discharged from UPW production process, high recovery design is beneficial to reduce wastewater discharge. According to the solution-diffusion model, permeate concentrations increase at higher feed concentrations, which may limit to increase RO recovery. Interestingly, the bench-scale 2-pass RO test using five commercial membrane modules revealed permeate concentrations were not affected by feed concentrations below a critical value (35 mg/L as NaCl in this work). This means the first-pass RO recovery can be increased without decreasing permeate water quality as far as second-pass RO feed concentrations are below the critical values. Various 2-pass UPW-RO system designs (250 mg/L as NaCl of feed concentration) were analyzed using an industrial RO system simulator to investigate the effect of the first- and second-pass recovery. The simulation works found that increasing the first- and second-pass recovery decreased wastewater discharge, energy consumption, and the number of membrane modules without degrading permeate water quality.

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