Abstract
AbstractThe combination of diffractive optical elements or spatial light modulators with fully synchronized galvo scanners offers a possibility to scale up machining processes with ultra-short pulses to several 100 W of average power with minimal thermal impact. This will be demonstrated with the high-rate applications multi-pulse drilling on the fly and material removal with special intensity distributions up to an average power of 162 W and a removal rate of 16.5 mm3/min. Based on the experimental results strategies to achieve drilling rates of several 10,000 holes/s or removal rates of multiple 10 mm3/min will be discussed.
Highlights
Since the first demonstration of its high-quality [1,2,3] ultrashort laser processing has found its way into different applications, for micromachining and metals and for nanoprocessing and materials like semiconductors, glasses, and plastics e.g. summarized in [4]
E.g. in 2018, an average power of 3.5 kW was demonstrated for coherently combined ultrafast fiber lasers with 430 fs pulse duration and 80 MHz repetition rate [5], a value which was recently exceeded to 10.4 kW of average power [6] resulting in a pulse energy of about 130 μJ with an even shorter pulse duration of 254 fs
High average powers are achieved with the innoslab technology [8] where already in 2010 an average power of 1.1 kW was demonstrated for a repetition rate of 20 MHz and a pulse duration of 615 fs [9] and recently 530 W for a pulse duration of 30 fs at a repetition rate of 500 kHz was demonstrated [10]
Summary
Since the first demonstration of its high-quality [1,2,3] ultrashort laser processing has found its way into different applications, for micromachining and metals and for nanoprocessing and materials like semiconductors, glasses, and plastics e.g. summarized in [4]. The total costs of processes often represent the limiting factor for wider use of ultrashort pulsed lasers systems. High average powers are achieved with the innoslab technology [8] where already in 2010 an average power of 1.1 kW was demonstrated for a repetition rate of 20 MHz and a pulse duration of 615 fs [9] and recently 530 W for a pulse duration of 30 fs at a repetition rate of 500 kHz was demonstrated [10]. Missing average power will not be an issue in the future the challenge will rather be to deal with it by keeping the high machining quality as it will be shown
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