High rate deposition system for metal-cluster/SiO x C y H z –polymer nanocomposite thin films

Abstract

A system for deposition of nanocomposite materials consisting of a SiOxCyHz–polymer matrix and Ag nanoclusters is presented. Ag nanoclusters with sizes between 2 and 20 nm are produced in a gas aggregation cluster source and are deposited through a focused beam at a high rate. This cluster source is presented in detail and the characteristics of the produced nanoclusters are shown. Simultaneously, a SiOxCyHz–polymer matrix is grown from the precursor hexamethyldisiloxane in an RF plasma. The beam of clusters is deposited into the growing polymer, forming the composite material. This process allows the rapid deposition of composite material with varying metal nanocluster concentrations and properties. Since the cluster generation is separated from the matrix growth, the properties of both can be controlled independently. In this study, we present two types of nanocomposite samples, in the first the Ag nanoclusters are homogeneously distributed in the matrix, in the second type the Ag nanoclusters form a layer which is covered by the matrix. These samples are investigated using transmission electron micrography to determine the morphology. Furthermore, the optical properties are probed using optical transmission spectroscopy and the plasmonic resonance behavior is discussed.