Abstract
Fe83Gd17-O granular soft magnetic films with high electrical resistivity were successfully prepared at a rather high rate (∼90 nm/min) by the reactive evaporation method, in which an O2 molecular beam was used. The films with good properties showed a coercivity of ∼2 Oe, 4πMs of ∼8000 G, a uniaxial anisotropy field of ∼20 Oe, and a resistivity of ∼500μΩcm. The easy axis of the inplane anisotropy was found to be generated in the direction normal to the plane of O2 beam incidence. After annealing at 250°C for 2 hours, the 4πMs of as-deposited films increased to values of over 10000 G.
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