Abstract
Low dislocation density ultraviolet (UV) AlGaN∕GaN multiple quantum well (MQW) structure was grown using atomic layer deposition (ALD) technique. The AlGaN∕GaN MQW grown on the sapphire substrate consisted of three GaN QWs and four AlGaN barriers formed by ALD grown AlN∕GaN superlattices. The as-grown sample showed smooth surface morphology with a root-mean-square roughness value of only 0.35nm, and no surface cracks were found. The dislocation density was estimated to be as low as 3.3×107cm−2. X-ray and transmission electron microscope data showed the MQW had sharp interfaces with good periodicity. The sample had an UV photoluminescence emission at 334nm (3.71eV) with a very narrow linewidth of 47meV at 13K. The cathodoluminescence image revealed a fairly uniform luminescence pattern at room temperature. The AlGaN∕GaN MQW grown by ALD technique should be useful for providing high crystalline quality for fabrication of various optical devices.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.