Abstract
We demonstrate high-quality monocrystalline NbN films deposited by DC magnetron sputtering on a GaN/AlN waveguiding heterostructure. NbN layers with a thickness of 8 nm are grown along the [111] direction, and show two orientation domains with NbN(111) [2-1-1]//AlN (0001) [10-10] and NbN(111) [2-1-1]//AlN(0001) [01-10] epitaxial relationships. Our NbN films display a critical temperature of 13.2 K, with the superconducting transition taking place in a temperature range of only 0.7 K.
Highlights
Quantum optics is undergoing tremendous progress, both conceptually and experimentally
We demonstrate high-quality monocrystalline NbN films deposited by DC magnetron sputtering on a GaN/AlN waveguiding heterostructure
A new paradigm in nanophotonics was introduced in 2001 when single-photon detection was demonstrated with superconducting nanowire single-photon detectors (SNSPDs)
Summary
Quantum optics is undergoing tremendous progress, both conceptually and experimentally. High-quality NbN nanofilms on a GaN/AlN heterostructure We demonstrate high-quality monocrystalline NbN films deposited by DC magnetron sputtering on a GaN/AlN waveguiding heterostructure.
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