Abstract
Numerous bulk crystalline materials exhibit attractive nonlinear and luminescent properties for classical and quantum optical applications. A chip-scale platform for high quality factor optical nanocavities in these materials will enable new optoelectronic devices and quantum light-matter interfaces. In this article, photonic crystal nanobeam resonators fabricated using focused ion beam milling in bulk insulators, such as rare-earth doped yttrium orthosilicate and yttrium vanadate, are demonstrated. Operation in the visible, near infrared, and telecom wavelengths with quality factors up to 27,000 and optical mode volumes close to one cubic wavelength is measured. These devices enable new nanolasers, on-chip quantum optical memories, single photon sources, and non-linear devices at low photon numbers based on rare-earth ions. The techniques are also applicable to other luminescent centers and crystal.
Highlights
Optical nanocavities with high quality factors and small mode volumes are an enabling technology for on-chip photonic devices such as low-power opto-electronic switches, low threshold lasers, cavity-optomechanics, and on-chip quantum information processing [1,2,3]
Nanoresonators with a large quality factor-to-mode volume ratio are desirable for strong Purcell enhancement of light-matter interactions that leads to high optical nonlinearity [4], efficient lasing [5,6], bright quantum light emissions [7, 8], and optoelectronic devices operating at the single photon level [9,10]
There are numerous other materials, including complex oxide crystals (e. g. yttrium orthosilicate (YSO), yttrium vanadate (YVO), lithium niobate (LiNbO3), and potassium titanyl phosphate (KTiOPO4)), with interesting nonlinear and luminescent properties that can be exploited for applications in classical and quantum nanooptics
Summary
Optical nanocavities with high quality factors and small mode volumes are an enabling technology for on-chip photonic devices such as low-power opto-electronic switches, low threshold lasers, cavity-optomechanics, and on-chip quantum information processing [1,2,3]. While several studies on fabricating photonic cavities using FIB have been carried out, the results have mostly been of low quality factors [13,14,15], which have been attributed to optical property degradation, unrepeatable patterning or significant material stress. Employed a diamond thin film on which both 1-D and 2-D photonic crystal cavities were milled. Ref [15]. obtained a Q of 900 by milling a point defect in a siliconon-insulator slab cavity
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