Abstract
It is shown for the first time that suppressing parasitic oscillations in a piezoelectric resonator with a lateral electric field by applying a damping coating or by spatially separating the HF electric field source from the resonating plate allows us to achieve record-high Q values for parallel and series resonances. The potential to fabricate an array of acoustically decoupled resonators on a single piezoelectric substrate, and to design microdisplacement sensors with temperature compensation, is also demonstrated for the first time.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: Bulletin of the Russian Academy of Sciences: Physics
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.