Abstract
An enhanced type of photonic crystal heterostructure microcavity obtained by tuning the radii of air holes close to the photonic crystal waveguide was designed and experimentally verified. The quality factor of the optimized cavity was about 1.73×105, which is greatly increased compared with that of the original heterostructure cavity. The main imperfections of the cavities were caused by the over-developing and over-etching of the side of the cavity structure.
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