Abstract
How to control electromagnetic wave effectively is the key to the realization of applicable filters in many optics technologies. In our work, a SU-8 photoresist micro-disk is written onto a photonic crystal waveguide to control electromagnetic wave. Corresponding simulation and experiment shows that, the quality Q increases as the thickness of SU-8 smaller. When the thickness exceeds 400nm, the change of thickness has little influence on electromagnetic waves. Besides, the increase of the radius of disc-shaped SU-8 can also increase the Q value. By optimizing the simulation and experimental data, we can successfully create a SU-8 photoresist micro-disk cavity with the thickness of 5 µm and height of 20 nm, the quality factor of Q can reach 8200. However, longer exposure time and more stable experimental equipment is needed if we want to get a larger radius. The method in our work by using SU-8 photoresist micro-disk on photonic crystals to control electromagnetic wave is more practical and flexible, which can provide new significance for research into optical filter.
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