Abstract
This paper reports on the demonstrations of first-order antisymmetric Lamb wave (A1) mode resonator as a new platform for front-end filtering of the fifth-generation (5G) wireless communication. The sub-6 GHz resonance in this work is achieved by employing the A1 mode in the micromachined Y-cut Lithium Niobate (LiNbO3) thin films. The spurious modes mitigation is achieved by optimizing the distribution of the electric field. The demonstrated figure-of-merit ( $\text {FoM}=Q\cdot k_{t}^{2}$ ) of 435 marks the first time that a new resonator technology with the FoMs exceeds those of surface acoustic wave (SAW) resonators and thin-film bulk acoustic resonators (FBARs) in the sub-6 GHz (1–6 GHz) frequency range. [2019-0241]
Highlights
I N RESPONSE to customers’ demand for more mobile video streaming, cloud computing, virtual reality, and Internet-of-Things (IoT) applications, the global mobile data traffic is projected to increase by 45% per year in the decade [1]–[3]
Such a large fractional bandwidths (FBW) greatly challenges the capabilities of the incumbent mobile front-end filtering solution, which remains essential for accessing the radio frequency (RF) spectrum and 5G new radio (NR)’s coexistence with current and emerging applications that are spectrally nearby
Lamb wave acoustic or MEMS resonators based on single-crystal X, Y, and Z-cut LiNbO3 thin films are receiving increasing research attention and several reported demonstrations have broken the records of FoM due to their high kt2 (>20%) and low damping loss [23]–[29]
Summary
I N RESPONSE to customers’ demand for more mobile video streaming, cloud computing, virtual reality, and Internet-of-Things (IoT) applications, the global mobile data traffic is projected to increase by 45% per year in the decade [1]–[3]. 5G bands can end up demanding an FBW as high as 24% (e.g., 3.3 GHz – 4.2 GHz) [4] Such a large FBW greatly challenges the capabilities of the incumbent mobile front-end filtering solution, which remains essential for accessing the radio frequency (RF) spectrum and 5G new radio (NR)’s coexistence with current and emerging applications that are spectrally nearby. To simultaneously achieve low IL, large FBW, sharp out-of-band rejection, and steep skirt for 5G filters, acoustic resonators have to be developed with concurrent high kt and Q, and large FoM up to 6 GHz. Recently, Lamb wave acoustic or MEMS resonators based on single-crystal X-, Y-, and Z-cut LiNbO3 thin films are receiving increasing research attention and several reported demonstrations have broken the records of FoM due to their high kt (>20%) and low damping loss [23]–[29]. These types of devices have shown strong potential for enabling high-performance miniaturized filters for future 5G front-ends
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