High purity GaAs and Al xGa 1-xAs grown by metalorganic molecular beam epitaxy

Abstract

High purity GaAs and Al x Ga 1- x As were grown by metalorganic molecular beam epitaxy (MOMBE) using metalorganic sources and arsenic (As 4). In GaAs growth using triethylgallium (TEG) and As 4, carrier concentrations depended on As 4 pressure and substrate temperatures. Below 1.5 x 10 -4 Torr As 4 pressure, the p-type carrier concentrations decreased with an increase in As 4 pressure. Above 1.5 x 10 -4 Torr As 4 pressure, the epilayer converted from p-type to n-type conductivity. Carrier concentrations decreased with a decrease in substrate temperatures. At 500°C and 1.5 x 10 -4 Torr As 4 pressure, the carrier concentration in the p-type GaAs epilayer exhibited 1.5 x 10 14 cm -3 with a room temperature mobility of 400 cm 2/V.s. Al x Ga 1-xAs ( x=0.1-0. .2) was also grown using TEG, three different Al sources (triethylaluminum (TEA), trimethylaluminum (TMA) and dimethylaluminum hydride (DMAH) and As 4. Using TEG, TEA and As 4, the Al 0.15Ga 0.85As epilayer showed p-type conduction with carrier concentration of 1.2x10 15 cm -3 and mobility of 117 cm 2/V.s. This carrier concentration is the lowest value ever reported for Al x Ga 1- x As grown by MOMBE.