Abstract
We used high pressure d.c. sputtering to deposit superconducting thin films (YBa 2Cu 3O 7 − δ (YBCO) and Bi 2Sr 2CaCu 2O 8 + x). With a.c. susceptibility measurements one can not only quickly characterize the superconducting properties of the sample, but also identify the layered growth of the films. Measurements of the gas phase composition of the sputter deposition show an unexpectedly high oxygen/metal ratio. The reason for this ratio is investigated. Measurements of the evaporation of YBCO target material yield spectra are presented, where the most important metal and metal-oxygen species are identified.
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