Abstract
We have investigated the scaling of peak vacuum ultraviolet output power from homogeneous Xe dielectric barrier discharges excited by short voltage pulses. Increasing the Xe fill pressure above 1 bar provides an increased output pulse energy, a shortened pulse duration and increases in the peak output power of two to three orders of magnitude. High peak power pulses of up to 6 W cm−2 are generated with a high efficiency for pulse rates up to 50 kHz. We show that the temporal pulse characteristics are in good agreement with results from detailed computer modelling of the discharge kinetics.
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