Abstract
At wavelength metrology offers a unique opportunity to characterize ultra high quality optics of diffraction limited performance. This technique is based on a coherent interaction of incident wave fields reflected from different surface positions. The mirror surface acts as a phase object which introduces a phase error in the outgoing wave fields. Resultant aberrated wavefront modulates the intensity near the focal plane. The modulated intensity profile can be used to retrieve the mirror shape profile using a numerical phase retrieval method which is developed in the present work. This at-wavelength metrology gives a precise shape information of a mirror having a figure error < 1nm which is extremely difficult to measure with conventional metrology tools.
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