Abstract
A setup of two reflective-type optical sensors for the on-line real-time measurement of straightness and angular errors of a linear stage is presented. The arrangement is similar to that of a linear encoder and can make on-line measurements of stage errors for the analysis of automatic processes as well as real time monitoring. The reflector used as the sensor reference plane was a rectangular piece of commercial silicon wafer. The wafer fixed to the side of the slide was very flat and had good reflective properties. A silicon wafer is much cheaper than a long optically flat mirror of similar precision. The standard deviation of the straightness sensor and the angular error were verified as 0.06 μm and 0.08 arcsec. The accuracy of the two sensors was verified as ±0.25 μm and ±1 arcsec. The two sensors were integrated with a single axis PZT-based stage for real time straightness compensation experiments and the results showed straightness compensation from 3.5 μm down to 0.4 μm.
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