Abstract
A micro ball tip is a core component of high precision coordinate measuring machines. The present micro ball tips cannot satisfy the high-precision measuring requirements of high aspect ratio microstructures due to their large diameter and low accuracy. In the previous study, we fabricated a micro monolithic tungsten ball tip by using arc discharge and surface tension principles. However, the fabrication success rate of forming a micro ball tip is less than 10%. In the present study, the Taguchi method has been applied to increase the fabrication success rate, and it has increased to 57.5%. The output response is evaluated in terms of the diameter, roundness, and center offset of the tungsten probe ball tips. The smaller-the-better signal-to-noise ratio is applied to analyze the influence of various parameters. The proposed parameters can be used to increase the fabrication success rate and accuracy of the monolithic probe ball tip.
Highlights
We found that the t-values of roundness and center offset were greater than t0.05 (78) = 1.665
Uniform electric field intensity and control variable experiments were performed to obtain the appropriate range of the process parameters to promote the success rate of fabricating micro monolithic tungsten ball tips using arc discharge
The output response of the parameters was evaluated in terms of the diameter, roundness error, and center offset error of the probe tips
Summary
Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations. Fabricated a micro ruby ball, with a diameter of 120 μm and roundness and center offset errors of more than 1 μm. Tungsten is a suitable material for fabricating micro ball tips because of its high hardness and wear resistance [8,9]. Adhesion, material removal, and melting, are used to fabricate micro ball tips. Fabricated micro monolithic tungsten ball tips through. The fabricated monolithic tungsten ball tips have the advantage of high cision, are easy to operate, and have a low cost. These results can be used to the surface morphology of the tungsten ball tip are shown These results can be used to increase the fabrication success rate and accuracy of the monolithic probe ball tip.
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