High precision even-power phase modulation method for a self-mixing displacement sensor under the weak feedback regime.

Abstract

A novel method called even-power phase modulation is proposed in a self-mixing displacement sensor to improve measuring accuracy, to the best of our knowledge, which is realized by combining the even-power fast algorithm with the sinusoidal phase-modulation method. By performing the even-power fast algorithm in the self-mixing interference system, the spectrum of harmonic components is broadened. In this case, the extracted first and second harmonic components in the frequency domain contain rich information, and the displacement of the target can be accurately reconstructed. The principle and signal processing approach are introduced in detail, and the simulation results show that the reconstruction error can be effectively reduced compared with the electro-optic modulator phase modulation method. A series of experiments at different vibration amplitudes is conducted to confirm the feasibility and effectiveness of the method. An amplitude of 120 nm is proved to be measurable, and the absolute error is 10 nm, which shows great potential in the field of non-contact nanometer vibration measurement sensors.