High precision displacement measuring interferometer based on the active modulation index control method

Abstract

This study proposes a simple, high-precision, and wide-measurement-range displacement measuring interferometer. A frequency-modulated laser diode (LD) source at 30 MHz was employed for the interferometer. The interference signal comprised a series of harmonics of the modulation frequency. Normally, the signal-to-noise ratio (SNR) of harmonics changes rapidly because of the unbalanced length between the two arms of the interferometer; hence, the measurement accuracy and range were limited. In this study, the SNR of the harmonics was improved by controlling the modulation excursion of the LD. Moreover, all harmonics with high SNR in a specific measurement range can be detected simultaneously using lock-in amplifiers (LIAs). Therefore, the displacement was determined using the pair of harmonics with the best SNR from the detected harmonics. To verify the measurement accuracy, the proposed interferometer was utilised to measure the nanoscale displacement induced by a piezo actuator (PZT) with sinusoidal and triangular shapes.