Abstract
Large-sized gantry-type linear motor sliders are widely used in industry (e.g. in liquid crystal panel production equipment). An appropriate control model is important for deriving control methods to improve control performance. Although various control models of large-sized gantry-type linear motor sliders have been developed in previous studies, no results are yet reported regarding control models which precisely reproduce characteristics of a large-sized gantry-type linear motor slider. In general, a method to derive a transfer function by using frequency responses can be employed to obtain an accurate control model, however, large sized gantry-type linear motor sliders have unique characteristics, namely “distortion” and “coupling”, thus the transfer function derived using only the frequency response cannot reproduce the experimental results with high accuracy. In this paper we report on a method to obtain a highly precise control model of a large sized gantry-type linear motor slider.
Highlights
In recent years, number of applications of linear motors in industry has increased [1, 2]
In order to reproduce the characteristic caused by coupling of the two tables, the position difference between the two tables should converge to a certain value when the input step force reference is applied to one of the two sliders in the control model
Verification of simulation model In order to verify the validity of the modified control model, comparison between the simulation results of modified control model and actual experimental results was conducted
Summary
Number of applications of linear motors in industry has increased [1, 2]. A control model of largesized gantry-type linear motor slider was developed by using a spring-mass-damper system [4]. Large sized gantry-type linear motor sliders have unique characteristics, namely “distortion” and “coupling”.
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