Abstract

High-power sixth harmonic generation from an Nd:YAG laser (10ns, 10kHz) has been achieved with a KBe2BO3F2 (KBBF) prism-coupled device (PCD) containing a 1.95mm thick KBBF crystal. The highest output power reached 120.5mW at 177.3nm, and the highest conversion efficiency from 354.7 to 177.3nm was 1.82%. Moreover, stable sixth harmonic output with an average power of 22.2mW was produced by another KBBF-PCD, in which the thickness of the KBBF crystal was 1.51mm. The highest and stable sixth harmonic output powers are improved by about three and six times compared with the previously published results, respectively.

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